Browsing by Author "McCoy, John Curtis"

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    • Medium energy ion implantation of Germanium into heated <111> Silicon 
      McCoy, John Curtis (Texas A&M University, 1993)
      Medium energy ion implantation of Ge into heated <II I> Si was investigated. legh fluence implants of Ge were made at energies of 40 or 60 keV into <III> Si substrates at room temperature or heated to 300'C or higher. ...